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Does Axcelis (ACLS) New Purion H6 Tool Reshape Its Edge In Ion Implantation?
Earlier this month, Axcelis Technologies introduced the Purion H6™ high current ion implanter, a next-generation tool engineered for advanced logic, memory, image sensor and mature-node applications, emphasizing improved dose control, particle reduction, source life and productivity.
This launch expands the established Purion H platform with a single solution aimed at higher yield, lower cost of ownership and greater reliability across a wide range of high current implantation needs.
We’ll...